颁布功夫：2020-11-12
人气： 
| Specification | Value |
|---|---|
| Measured Vacuum Level | < 1 Pa (achieved 0.17 Pa with mechanical pump) |
| Temperature Range | –140°C to 600°C |
| Temperature Accuracy | ±1°C |
| Temperature Uniformity | ±3°C |
| Probe Adjustment Accuracy | 2 μm positioning accuracy, 3 μm resolution, ±2 μm linearity |
| Leakage Current Sensitivity | 100 fA |
| Sample Stage | 4" oxygen-free copper plate, flatness: 5 μm |
| Vacuum Chamber | ?8" × H7", made of 304 stainless steel |
| Delivery Location | Nanjing University of Science and Technology |
| Delivery Date | November 12, 2020 |
| Delivered Product | LVTS Thermal Vacuum Probe Station |
| Online Store | PLCTS Store – LVTS Thermal Vacuum Probe Station |
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